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In-situ monitoring of the influence of inert gases (Ne, Ar, Kr, Xe) on plasma properties and the growth of magnetron sputtered nanostructured silver thin film
- 1.NOVOTNÝ, M., BULÍŘ, J., LANČOK, J., POKORNÝ, P., PIKSOVÁ, K., FEKETE, L., MUSIL, J., ČEKADA, M. In-situ monitoring of the influence of inert gases (Ne, Ar, Kr, Xe) on plasma properties and the growth of magnetron sputtered nanostructured silver thin film. In: LEI, M.K., ed. The 8th Asian - European International Conference on Plasma Surface Engineering. AEPSE 2011. Dalian: AJC PSE, EJC PISE, 2011, 216 O-101.
Number of the records: 1