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Deposition of PZT thin films on copper-coated polymer foils
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SYSNO ASEP 0337271 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Deposition of PZT thin films on copper-coated polymer foils Title Depozice PZT tenkých vrstev na poměděné polymerové folie Author(s) Suchaneck, G. (DE)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Jastrabík, Lubomír (FZU-D) RID, ORCID
Dejneka, Alexandr (FZU-D) RID, ORCID
Kiselev, D. (PT)
Bdikin, I. (PT)
Kholkin, A. (PT)
Gerlach, G. (DE)Number of authors 8 Source Title Relability and Properties of Electronic Devices on Flexible Substrates (Simposium I at the 2008 MRS Fall Meeting). - Warrendale, PA : MRS, 2009 / Greer J.R. ; Vlassak J. ; Daniel J. ; Tsui T. - ISBN 9781615673834 Pages i0305/1-i0305/2 Number of pages 2 s. Action Materials Research Society Fall Meeting Event date 01.12.2008-05.12.2008 VEvent location Boston Country US - United States Event type WRD Language eng - English Country US - United States Keywords PZT on polymer-foils ; RF-modulated plasma jet system Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects GA202/08/1009 GA ČR - Czech Science Foundation (CSF) KJB100100703 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z10100522 - FZU-D (2005-2011) Annotation In this work, we investigate the deposition of Pb(Zr,Ti)O3 (PZT) thin films directly onto copper-coated polymer foils. (111)-textured PZT was fabricated on these flexible substrates by means of a RF-modulated plasma jet system comprising a hollow cathode for reactive sputtering. Film composition and microstructure as well as piezoelectric and dielectric film properties were investigated. The deposited films are suitable as embedded capacitors as well as flexible piezoelectric sensors, actuators and power generators. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2010
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