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RBS and XPS measurements of Ag and Er implantation into the silica

  1. 1.
    SYSNO ASEP0323154
    Document TypeC - Proceedings Paper (int. conf.)
    R&D Document TypeConference Paper
    TitleRBS and XPS measurements of Ag and Er implantation into the silica
    TitleMěření Ag a Er implantovaných v silikátových sklech metodami XPS a RBS
    Author(s) Kormunda, M. (CZ)
    Malinský, Petr (UJF-V) RID, ORCID, SAI
    Macková, Anna (UJF-V) RID, ORCID, SAI
    Švecová, B. (CZ)
    Nekvindová, P. (CZ)
    Number of authors5
    Source TitleBook of Contributed Papers. - Bratislava : Department of Experimental Physics, Comenius University in Bratislava, 2009 - ISBN 978-80-89186-45-7
    Pagess. 179-180
    Number of pages2 s.
    Action17th Symphosium on Application of Plasma Processes
    Event date17.01.2009-22.01.2009
    VEvent locationLiptovský Ján
    CountrySK - Slovakia
    Event typeWRD
    Languageeng - English
    CountrySK - Slovakia
    KeywordsAg, Er implantation ; silica glass ; RBS and XPS analysis
    Subject RIVBG - Nuclear, Atomic and Molecular Physics, Colliders
    R&D ProjectsKJB100480601 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    CEZAV0Z10480505 - UJF-V (2005-2011)
    AnnotationMetal particle implantation into glasses has promising properties for application in optical devices. These properties depend on the size, shape, density and spatial distribution of metal particles. Heavy-ion implantation of silica glasses is an efficient method of fabrication of the metal-nanoparticles composites that are promising for ultra-fast optical devices. The Ag+ and Er+ ions were implanted into silicate glasses on implantor in collaboration with Forschungzentrum Dresden-Rossendorf. The depth distributions of implanted metal were investigated by RBS and XPS analytical methods. SRIM 2006 calculations were used for comparison. Implantation of Ag and Er ions into silicate glass was studied. The energies of the implanted Ag and Er ions were 330 keV and used implantation fluence of ions was 1.0 x 1016 ions.cm-2.
    WorkplaceNuclear Physics Institute
    ContactMarkéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228
    Year of Publishing2009
Number of the records: 1  

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