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Low-energy SEM imaging of bevelled multilayers
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SYSNO 0205091 Title Low-energy SEM imaging of bevelled multilayers Author(s) Müllerová, Ilona (UPT-D) RID, SAI, ORCID
Zadražil, Martin (UPT-D)
Frank, Luděk (UPT-D) RID, SAI, ORCIDSource Title Journal of Computer Assisted Microscopy. Roč. 9, č. 2 (1997), s. 121-122 Conference MCEM '97 /3./ - Multinational Congress on Electron Microscopy, Portorož, 05.10.1997-08.10.1997 Document Type Článek v odborném periodiku Grant GA202/95/0280 GA ČR - Czech Science Foundation (CSF) CP93/12283, XE - EU countries Language eng Country US Permanent Link http://hdl.handle.net/11104/0100711
Number of the records: 1