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Low-energy SEM imaging of bevelled multilayers
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SYSNO ASEP 0205091 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Low-energy SEM imaging of bevelled multilayers Author(s) Müllerová, Ilona (UPT-D) RID, SAI, ORCID
Zadražil, Martin (UPT-D)
Frank, Luděk (UPT-D) RID, SAI, ORCIDSource Title Journal of Computer Assisted Microscopy - ISSN 1040-7286
Roč. 9, č. 2 (1997), s. 121-122Number of pages 2 s. Action MCEM '97 /3./ - Multinational Congress on Electron Microscopy Event date 05.10.1997-08.10.1997 VEvent location Portorož Country SI - Slovenia Language eng - English Country US - United States Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GA202/95/0280 GA ČR - Czech Science Foundation (CSF) Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 1999
Number of the records: 1