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Microwave and hot filament chemical vapour deposition of diamond multilayers on Si and WC-Co substrates
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SYSNO ASEP 0054689 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Microwave and hot filament chemical vapour deposition of diamond multilayers on Si and WC-Co substrates Title Chemická depozice z plynné fáze využívající mikrovlnný výboj nebo žhavené vlákno diamantových multivrstev na Si a WC-Co substrátech Author(s) Kadlečíková, M. (SK)
Vojs, M. (SK)
Breza, J. (SK)
Veselý, M. (SK)
Frgala, Z. (CZ)
Michalka, M. (SK)
Matějková, Jiřina (UPT-D)
Vojačková, A. (SK)
Daniš, T. (SK)
Marton, M. (SK)Source Title Microelectronics Journal. - : Elsevier - ISSN 0026-2692
Roč. 38, č. 1 (2007), s. 20-23Number of pages 4 s. Language eng - English Country NL - Netherlands Keywords chemical vapour deposition ; nanocrystalline diamond ; Raman spectroscopy ; scanning electron microscopy Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects GA202/05/0607 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000243832300004 DOI 10.1016/j.mejo.2006.10.006 Annotation A serious problem in the use of chemical-vapour-deposited polycrystalline diamond coatings in electronics, optics as well as in cutting tools is the high surface roughness. In our work, microcrystalline and nanocrystalline diamond films with a thickness of 0.5–5 .mu.m were deposited using microwave chemical vapour deposition (MW CVD), and with a thickness of 1–4 .mu.m by hot filament chemical vapour deposition (HF CVD). For both deposition technologies, we investigated the effect of a negative bias upon the formation of microcrystalline and nanocrystalline diamond multilayers. In the cases of smooth Si and relief WC–Co substrate surfaces, the multilayers were found to have a "cauliflower" look. The structure and composition of deposited layers were checked by scanning electron microscopy and Raman spectroscopy. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2007
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