Microwave and hot filament chemical vapour deposition of diamond multilayers on Si and WC-Co substrates

KADLEČÍKOVÁ, M., VOJS, M., BREZA, J., VESELÝ, M., FRGALA, Z., MICHALKA, M., MATĚJKOVÁ, Jiřina, VOJAČKOVÁ, A., DANIŠ, T., MARTON, M. Microwave and hot filament chemical vapour deposition of diamond multilayers on Si and WC-Co substrates. Microelectronics Journal. 2007, 38(1), 20-23. ISSN 0026-2692. E-ISSN 1879-2391. Available: doi: 10.1016/j.mejo.2006.10.006