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Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks
- 1.Volodin, V.A., Cheng, Y., Bulgakov, A., Levy, Y., Beránek, J., Nagisetty, S. S., Zukerstein, M., Popov, A. A., Bulgakova, N. M. Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks. In: CLEO 2023 Technical Digest Series. Washington: Optica Publishing Group, 2023, č. článku STh1N.6. ISBN 978-1-957171-25-8. Available: doi: 10.1364/CLEO_SI.2023.STh1N.6.
Number of the records: 1