On-chip digital holographic interferometry for measuring wavefront deformation in transparent samples

0574767 - ÚFP 2024 RIV US eng J - Journal Article
Mach, Marek - Psota, Pavel - Žídek, Karel - Mokrý, Pavel
On-chip digital holographic interferometry for measuring wavefront deformation in transparent samples.
Optics Express. Roč. 31, č. 11 (2023), s. 17185-17200. ISSN 1094-4087
R&D Projects: GA MŠMT(CZ) EF16_026/0008390; GA ČR(CZ) GA19-22000S
Institutional support: RVO:61389021
Keywords : on-chip * interferometry * wavefront deformation
OECD category: Optics (including laser optics and quantum optics)
Impact factor: 3.8, year: 2022
Method of publishing: Open access
https://opg.optica.org/oe/fulltext.cfm?uri=oe-31-11-17185&id=530478

This paper describes on-chip digital holographic interferometry for measuring the wavefront deformation of transparent samples. The interferometer is based on a Mach-Zehnder arrangement with a waveguide in the reference arm, which allows for a compact on-chip arrangement. The method thus exploits the sensitivity of digital holographic interferometry and the advantages of the on-chip approach, which provides high spatial resolution over a large area, simplicity, and compactness of the system. The method's performance is demonstrated by measuring a model glass sample fabricated by depositing SiO2 layers of different thicknesses on a planar glass substrate and visualizing the domain structure in periodically poled lithium niobate. Finally, the results of the measurement made with the on-chip digital holographic interferometer were compared with those made with a conventional Mach-Zehnder type digital holographic interferometer with lens and with a commercial white light interferometer. The comparison of the obtained results indicates that the on-chip digital holographic interferometer provides accuracy comparable to conventional methods while offering the benefits of a large field of view and simplicity.
Permanent Link: https://hdl.handle.net/11104/0351270