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Intensity distribution modulation of multiple beam interference pattern
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SYSNO ASEP 0567486 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Intensity distribution modulation of multiple beam interference pattern Author(s) Jochcová, Dominika (FZU-D) ORCID
Kaufman, Jan (FZU-D) ORCID
Hauschwitz, Petr (FZU-D) ORCID
Brajer, Jan (FZU-D) ORCID
Vanda, Jan (FZU-D) RID, ORCIDNumber of authors 5 Source Title MM Science Journal. - : MM publishing - ISSN 1803-1269
Roč. 2019, Dec (2019), s. 3652-3656Number of pages 5 s. Language eng - English Country CZ - Czech Republic Keywords direct Laser interference patterning ; multiple beam interference ; interference field simulation ; diffractive optical element ; laser microstructuring Subject RIV BH - Optics, Masers, Lasers OECD category Optics (including laser optics and quantum optics) R&D Projects LM2015086 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LO1602 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Open access Institutional support FZU-D - RVO:68378271 UT WOS 000532572200043 EID SCOPUS 85076599510 DOI 10.17973/MMSJ.2019_12_2019117 Annotation Nanostructuring and microstructuring approaches frequently used in microelectronics manufacturing, such as electron beam lithography or nanoimprint lithography,are considerably slow.In order to reduce processing time,laser patterning methods based on interference of multiple beams have been developed.Within one laser pulse,a significant part of an irradiated area on a sample surface is patterned with desired micro- or sub-microstructures.Interference patterning goes beyond periodic lines and dots.Controlling the number of interfering beams,orientation of polarization vectors,relative phase shift,the beam angle of incidence allows to customize the intensity distribution on the sample surface.Simulations of various interference patterns were verified on CMOS camera using 1030nm laser diode.Based on these results,dot and line-like interference patterns were directly imprinted on the surface of carbon fiber reinforced polyether ether ketone plate by 1.8ps,11mJ las. pulses at 1030nm. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2023 Electronic address https://hdl.handle.net/11104/0338735
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