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Development and Optimization of VGF-GaAs Crystal Growth Process Using Data Mining and Machine Learning Techniques

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    SYSNO0547633
    TitleDevelopment and Optimization of VGF-GaAs Crystal Growth Process Using Data Mining and Machine Learning Techniques
    Author(s) Dropka, N. (DE)
    Böttcher, K. (DE)
    Holeňa, Martin (UIVT-O) SAI, RID
    Source Title Crystals. Roč. 11, č. 10 (2021). - : MDPI
    Article number1218
    Document TypeČlánek v odborném periodiku
    Grant GA18-18080S GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
    Institutional supportUIVT-O - RVO:67985807
    Languageeng
    CountryCH
    Keywords VGF-GaAs growth * machine learning * data mining * decision trees * correlation analysis * PCA biplot * k-means clustering
    Cooperating institutions Leibniz-Institut für Kristallzüchtung, Berlin (Germany)
    Leibniz Institute for Catalysis, Rostock (Germany)
    URLhttp://dx.doi.org/10.3390/cryst11101218
    Permanent Linkhttp://hdl.handle.net/11104/0323829
    FileDownloadSizeCommentaryVersionAccess
    0547633-afin.pdf33.2 MBOA CC BY 4.0Publisher’s postprintopen-access
     
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