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Emission spectroscopic diagnostics of weakly ionized argon-diluted plasmas: glow discharge and inductively coupled plasma
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SYSNO ASEP 0540408 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Emission spectroscopic diagnostics of weakly ionized argon-diluted plasmas: glow discharge and inductively coupled plasma Author(s) Weiss, Zdeněk (FZU-D) ORCID Number of authors 1 Article number 105018 Source Title Plasma Sources Science & Technology. - : Institute of Physics Publishing - ISSN 0963-0252
Roč. 29, č. 10 (2020), s. 1-19Number of pages 19 s. Language eng - English Country GB - United Kingdom Keywords transition rate diagrams ; transfer excitation processes ; charge-transfer ; probabilities ; spectrometer ; calibration ; hydrogen ; ionization ; glow discharge ; inductively coupled plasma ; emission spectroscopy ; Boltzmann plots ; transition rate diagrams ; local thermodynamic equilibrium ; Cu,Mn,Ti,Fe,Cr Subject RIV BL - Plasma and Gas Discharge Physics OECD category Fluids and plasma physics (including surface physics) R&D Projects EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Limited access Institutional support FZU-D - RVO:68378271 UT WOS 000584296000001 EID SCOPUS 85095974750 DOI 10.1088/1361-6595/abb41e Annotation An extensive study of Mn, Fe, Ti, Cr, Cu emission spectra from a Grimm-type glow discharge and an inductively coupled plasma (ICP), in argon, was performed, using the formalism of population functions (experimental Boltzmann plots) and transition rate diagrams. Emission characteristics of both spectral sources were compared. In both discharges the excitation of neutral metal atoms (Me I) is dominated by electron impact (EI) and in the excitation of singly charged ions (Me II) the charge transfer between Ar+ ions and Me I plays a significant role, especially in GDOES. Deviations from local thermodynamic equilibrium (LTE) were identified and classified. Experimental ‘excitation temperatures’ follow a pattern predicted by computer simulations with a collisional-radiative model: they are lower than the actual electron temperature, while this deviation is greater for the Me I system than Me II.
Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2021 Electronic address https://doi.org/10.1088/1361-6595/abb41e
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