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Functional nano–structuring of thin silicon nitride membranes
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SYSNO 0512017 Title Functional nano–structuring of thin silicon nitride membranes Author(s) Matějka, Milan (UPT-D) RID, ORCID, SAI
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Řiháček, Tomáš (UPT-D) RID, ORCID
Knápek, Alexandr (UPT-D) RID, ORCID, SAI
Kolařík, Vladimír (UPT-D) RID, ORCID, SAISource Title 5th IMAPS Flash Conference. Book of Abstracts. S. 74-75. - Brno : University of Technology, 2019 Conference International Microelectronics Assembly and Packaging Society Flash Conference /5./. IMAPS, 24.10.2019 - 25.10.2019, Brno Document Type Abstrakt Institutional support UPT-D - RVO:68081731 Language eng Country CZ Permanent Link http://hdl.handle.net/11104/0302234
Number of the records: 1