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Functional nano–structuring of thin silicon nitride membranes
- 1.MATĚJKA, Milan, KRÁTKÝ, Stanislav, ŘIHÁČEK, Tomáš, KNÁPEK, Alexandr, KOLAŘÍK, Vladimír. Functional nano–structuring of thin silicon nitride membranes. In: 5th IMAPS Flash Conference. Book of Abstracts. Brno: University of Technology, 2019, s. 74-75.
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