Mechanical and optical properties of SiO.sub.2./sub. thin films deposited on glass

0497477 - FZÚ 2019 RIV SK eng J - Journal Article
Šimurka, L. - Čtvrtlík, Radim - Tomáštík, Jan - Bektas, G. - Svoboda, Jan - Bange, K.
Mechanical and optical properties of SiO₂ thin films deposited on glass.
Chemical Papers. Roč. 72, č. 9 (2018), s. 2143-2151. ISSN 0366-6352
R&D Projects: GA MŠMT EF16_013/0001403
Grant - others:OP VVV - CTAO-CZ(XE) CZ.02.1.01/0.0/0.0/16_013/0001403; OPPK(XE) CZ.2.16/3.1.00/21545
Program: OPPK
Institutional support: RVO:68378271 ; RVO:61389013
Keywords : SiO2 films * glass * mechanical properties * refractive index * residual stress
OECD category: Nano-processes (applications on nano-scale); Inorganic and nuclear chemistry (UMCH-V)
Impact factor: 1.246, year: 2018

The optical and mechanical properties of amorphous SiO2 flms deposited on soda-lime silicate foat glass by reactive RF magnetron sputtering at room temperature were investigated in dependence of the process pressure. The densities of the flms are strongly infuenced by the process pressure and vary between 2.38 and 1.91 g cm−3 as the pressure changes from 0.27 to 1.33 Pa. The refractive indices of the flms shift between 1.52 and 1.37, while the residual compressive stresses in the deposited flms vary in the range from 440 to 1 MPa. Hardness and reduced elastic modulus values follow the same trend and decline with the increase of process pressure from 8.5 to 2.2 GPa and from 73.7 to 30.9 GPa, respectively. The abrasive wear resistance decreases with the density of the films.
Permanent Link: http://hdl.handle.net/11104/0290050