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Structural damage and ion-channelling effects in a single-crystal Si layer modified by medium-heavy ions
- 1.Mikšová, R., Macková, A., Jagerová, A., Yatskiv, R. Structural damage and ion-channelling effects in a single-crystal Si layer modified by medium-heavy ions. Surface and Interface Analysis. 2018, 50(11), 1243-1249. ISSN 0142-2421. E-ISSN 1096-9918. Available: doi: 10.1002/sia.6492
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