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Coordinate interferometric measuring system for positioning of a sample in electron-beam writer
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SYSNO 0467527 Title Coordinate interferometric measuring system for positioning of a sample in electron-beam writer Author(s) Lazar, Josef (UPT-D) RID, ORCID, SAI
Holá, Miroslava (UPT-D) RID, ORCID, SAI
Hrabina, Jan (UPT-D) RID, ORCID, SAI
Oulehla, Jindřich (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCID
Valtr, M. (CZ)
Klapetek, P. (CZ)Source Title NanoScale 2016. 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods. - Wroclaw : Wroclaw University of Technology, 2016 Conference NanoScale 2016. Seminar on Quantitative Microscopy (QM) /11./ and Seminar on Nanoscale Calibration Standards and Methods /7./, 09.03.2016 - 11.03.2016, Wroclaw Document Type Abstrakt Institutional support UPT-D - RVO:68081731 Language eng Country PL Keywords SPM * nanometrology * nanoscale * nanopositioning interferometry Permanent Link http://hdl.handle.net/11104/0265623
Number of the records: 1