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Coordinate interferometric measuring system for positioning of a sample in electron-beam writer
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SYSNO ASEP 0467527 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title Coordinate interferometric measuring system for positioning of a sample in electron-beam writer Author(s) Lazar, Josef (UPT-D) RID, ORCID, SAI
Holá, Miroslava (UPT-D) RID, ORCID, SAI
Hrabina, Jan (UPT-D) RID, ORCID, SAI
Oulehla, Jindřich (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCID
Valtr, M. (CZ)
Klapetek, P. (CZ)Number of authors 7 Source Title NanoScale 2016. 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods. - Wroclaw : Wroclaw University of Technology, 2016 Number of pages 1 s. Publication form Print - P Action NanoScale 2016. Seminar on Quantitative Microscopy (QM) /11./ and Seminar on Nanoscale Calibration Standards and Methods /7./ Event date 09.03.2016 - 11.03.2016 VEvent location Wroclaw Country PL - Poland Event type EUR Language eng - English Country PL - Poland Keywords SPM ; nanometrology ; nanoscale ; nanopositioning interferometry Subject RIV BH - Optics, Masers, Lasers Institutional support UPT-D - RVO:68081731 Annotation The short-range scanning probe microscope (SPM) system developed in cooperation between Institute of Scientific Instruments (ISI) and Czech Metrology Institute (CMI) has been modified by new interferometers developed at ISI. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2017
Number of the records: 1