- DBR diode based laser source working at 633 nm for dimensional nanome…
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DBR diode based laser source working at 633 nm for dimensional nanometrology

  1. 1.
    SYSNO0467526
    TitleDBR diode based laser source working at 633 nm for dimensional nanometrology
    Author(s) Řeřucha, Šimon (UPT-D) RID, ORCID, SAI
    Pham, Minh Tuan (UPT-D) RID, ORCID, SAI
    Čížek, Martin (UPT-D) RID, ORCID, SAI
    Hucl, Václav (UPT-D) RID, ORCID, SAI
    Lazar, Josef (UPT-D) RID, ORCID, SAI
    Číp, Ondřej (UPT-D) RID, SAI, ORCID
    Yacoot, A. (GB)
    Source TitleNanoScale 2016. 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods. S. 109-110. - Wroclaw : Wroclaw University of Technology, 2016
    Conference NanoScale 2016. Seminar on Quantitative Microscopy (QM) /11./ and Seminar on Nanoscale Calibration Standards and Methods /7./, 09.03.2016 - 11.03.2016, Wroclaw
    Document TypeAbstrakt
    Grant LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    GB14-36681G GA ČR - Czech Science Foundation (CSF)
    TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
    Institutional supportUPT-D - RVO:68081731
    Languageeng
    CountryPL
    Keywords laser metrology * DBR laser diode * laser interferometry * displacement metrology * laser system
    Permanent Linkhttp://hdl.handle.net/11104/0265622
     
Number of the records: 1  

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