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DBR diode based laser source working at 633 nm for dimensional nanometrology
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SYSNO 0467526 Title DBR diode based laser source working at 633 nm for dimensional nanometrology Author(s) Řeřucha, Šimon (UPT-D) RID, ORCID, SAI
Pham, Minh Tuan (UPT-D) RID, ORCID, SAI
Čížek, Martin (UPT-D) RID, ORCID, SAI
Hucl, Václav (UPT-D) RID, ORCID, SAI
Lazar, Josef (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCID
Yacoot, A. (GB)Source Title NanoScale 2016. 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods. S. 109-110. - Wroclaw : Wroclaw University of Technology, 2016 Conference NanoScale 2016. Seminar on Quantitative Microscopy (QM) /11./ and Seminar on Nanoscale Calibration Standards and Methods /7./, 09.03.2016 - 11.03.2016, Wroclaw Document Type Abstrakt Grant LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GB14-36681G GA ČR - Czech Science Foundation (CSF) TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Institutional support UPT-D - RVO:68081731 Language eng Country PL Keywords laser metrology * DBR laser diode * laser interferometry * displacement metrology * laser system Permanent Link http://hdl.handle.net/11104/0265622
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