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Laser micromachining of glass, silicon, and ceramics
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SYSNO ASEP 0449555 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Laser micromachining of glass, silicon, and ceramics Author(s) Řiháková, L. (CZ)
Chmelíčková, Hana (FZU-D) RIDSource Title Advances in Materials Science and Engineering. - : Hindawi - ISSN 1687-8434
Roč. 2015, Feb (2015), s. 584952Number of pages 6 s. Language eng - English Country US - United States Keywords laser micromachining of materials ; laser material treatment Subject RIV JP - Industrial Processing OECD category Materials engineering Method of publishing Open access Institutional support FZU-D - RVO:68378271 UT WOS 000355113200001 EID SCOPUS 84925610133 DOI 10.1155/2015/584952 Annotation A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held on laser material treatment is provided. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2016 Electronic address http://hdl.handle.net/11104/0251085
Number of the records: 1