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Fabrication of 3D diamond membranes for microfluidic systems
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SYSNO ASEP 0434869 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Fabrication of 3D diamond membranes for microfluidic systems Author(s) Varga, Marián (FZU-D) RID, ORCID
Babchenko, Oleg (FZU-D) RID, ORCID
Bauerová, Pavla (FZU-D)
Hruška, Karel (FZU-D) RID, ORCID
Jurka, Vlastimil (FZU-D) RID, ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAI
Rezek, Bohuslav (FZU-D) RID, ORCIDSource Title NANOCON 2014, 6th International Conference. - Ostrava : Tanger Ltd, 2015 - ISBN 978-80-87294-53-6 Pages s. 556-562 Number of pages 7 s. Publication form Print - P Action International Conference NANOCON /6./ Event date 05.11.2014-07.11.2014 VEvent location Brno Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords nanocrystalline diamond ; membranes ; microwave plasma ; microfluidics ; carbon foam Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) R&D Projects GAP108/12/0996 GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 UT WOS 000350636300096 EID SCOPUS 85006056985 Annotation Perfusion of cell medium, especially in microfluidic devices, can provide in-vivo-like conditions for cell cultures. The most recent demand on such systems is to include electronically active artificial cell support for in-situ monitoring. Diamond thin films exhibit advantageous combination of physical, mechanical, chemical, biocompatible and electronic properties for this purpose. In this work we explore two strategies for fabrication of self-standing three-dimensional nanocrystalline diamond membrane for implementation in microfluidic invivo like experiments: i) nucleation and chemical vapour deposition (CVD) growth of diamond on porous 3D carbon foam (with 80 pores per inch) and ii) selective diamond growth predefined by photolithographic processing using copper grid mask. The morphology and material quality of the fabricated membranes are characterized by scanning electron microscopy and Raman spectroscopy. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2018
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