Quality assessment of scintillation detector in SEM using MFT

0386386 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Bok, Jan - Schauer, Petr
Quality assessment of scintillation detector in SEM using MFT.
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2012 - (Mika, F.), s. 9-10. ISBN 978-80-87441-07-7.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./. Skalský dvůr (CZ), 25.06.2012-29.06.2012]
R&D Projects: GA ČR GAP102/10/1410; GA MŠMT EE.2.3.20.0103
Institutional support: RVO:68081731
Keywords : scintillation detector in SEM * modulation transfer function * e-beam scanning speed
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

One of the recent trends in S(T)EM is increasing of the e-beam scanning speed. In general, higher speeds decrease object degradation and prevent image artifacts caused by slow electrical discharging. However, the increase of the scanning speed is limited by the time response of the segnal-electron detector. When the detector response is slower than the scanning speed, it can have negative influence to the quality of the scanned image, such as contrast reduction and image blurring. Usually, the rise and fall edges of the time response curve to a square electron pulse have more complex form, such as a multi-exponential function of time. Evaluate and compare the time-dependent edges in contex of their influence on the image quality is rather complicated. Therefore, we propose to express the detector time response by the modulation transfer function (MTF), which contains all relevant information. It can give the answer to the important question, what maximum scanning speed can be used not to significantly decrease the image quality.
Permanent Link: http://hdl.handle.net/11104/0215685