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Diamond chemical vapor deposition
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SYSNO ASEP 0375450 Document Type K - Proceedings Paper (Czech conf.) R&D Document Type The record was not marked in the RIV Title Diamond chemical vapor deposition Author(s) Kromka, Alexander (FZU-D) RID, ORCID, SAI Source Title Proceedings of the 2nd Winter Education Seminar. - Praha : FZÚ AV ČR, 2011 / Remeš Z. ; Kromka A. ; Ledinský M. - ISBN 978-80-260-0911-5
11-16-28Number of pages 6 s. Action Winter educational seminar /2./ Event date 16.02.2011-18.02.2011 VEvent location Rokytnice n. J. Country CZ - Czech Republic Event type CST Language eng - English Country CZ - Czech Republic Keywords diamond ; thin film ; chemical vapor deposition ; hot filament ; microwave plasma Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects MEB0810082 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) KAN400100701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GAP108/11/0794 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100521 - FZU-D (2005-2011) Annotation Present paper reviews growth of diamond thin films by various chemical vapor deposition processes. Basic characteristics and common features of processes are pointed out with a respect to quality of grown films and standard process parameters. Novel and non-standard diamond syntheses techniques are briefly discussed. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2012
Number of the records: 1