Displacement Interferometry in Passive Fabry-Perot Cavity

0375382 - ÚPT 2012 RIV CZ eng C - Conference Paper (international conference)
Lazar, Josef - Číp, Ondřej - Oulehla, Jindřich - Pokorný, Pavel - Fejfar, Antonín - Stuchlík, Jiří
Displacement Interferometry in Passive Fabry-Perot Cavity.
NANOCON 2011. 3rd International Conference. Ostrava: Tanger spol. s r. o, 2011, s. 688-694. ISBN 978-80-87294-27-7.
[NANOCON 2011. International Conference /3./. Brno (CZ), 21.09.2011-23.09.2011]
R&D Projects: GA ČR GA102/09/1276; GA ČR GPP102/11/P820; GA AV ČR KAN400100701; GA MŠMT(CZ) LC06007
Institutional research plan: CEZ:AV0Z20650511; CEZ:AV0Z10100521
Keywords : refractometry * nanopositioning * interferometry * nanometrology
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

We present techniques oriented to improvement of precision in incremental interferometric measurements of displacements over a limited range where the atmospheric wavelength of the coherent laser source is either directly stabilized to a mechanical reference or is corrected to fit to the reference. This may represent a reduction of uncertainty linking the laser wavelength not to indirectly evaluated refractive index but to the setup mechanics which cannot be completely eliminated. Here we suggest an approach where the traditional interferometers are replaced by a passive Fabry-Perot cavity with position sensing using an intracavity transparent photodetector.
Permanent Link: http://hdl.handle.net/11104/0208053