Measuring the ion flux to the deposition substrate in the hollow Cathode plasma jet

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SYSNO	0308119
Title	Measuring the ion flux to the deposition substrate in the hollow Cathode plasma jet
Title	Měření iontového toku na depoziční substrát u plazmové trysky s efektem duté katody
Author(s)	Virostko, Petr (FZU-D) Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI} Čada, Martin (FZU-D)_{RID, ORCID, SAI} Adámek, Petr (FZU-D)_{RID, ORCID} Kment, Štěpán (FZU-D)_{RID, ORCID} Tichý, M. (CZ) Jastrabík, Lubomír (FZU-D)_{RID, ORCID}
Source Title	Plasma 2007. S. 427-430. - Melville, New York : American Instritute of Physics, 2008 / Hartfuss H.-J. ; Dudeck M. ; Muslelok J. ; Sadowski M.J.
Conference	International Conference on Research and Applications of Plasmas, German-Polish Conference on Plasma Diagnostics for Fusion and Laboratory /4./ and French-Polish Seminar on Thermal Plasma in Space and Laboratory /6./, Greifswald, 16.10.2007-19.10.2007
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	KAN400720701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	GA202/06/0776 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
Language	eng
Country	US
Keywords	hollow cathode * plasma jet * ion flux * deposition of thin films
Permanent Link	http://hdl.handle.net/11104/0160694

Number of the records: 1