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Measuring the ion flux to the deposition substrate in the hollow Cathode plasma jet
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SYSNO ASEP 0308119 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Measuring the ion flux to the deposition substrate in the hollow Cathode plasma jet Title Měření iontového toku na depoziční substrát u plazmové trysky s efektem duté katody Author(s) Virostko, Petr (FZU-D)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Čada, Martin (FZU-D) RID, ORCID, SAI
Adámek, Petr (FZU-D) RID, ORCID
Kment, Štěpán (FZU-D) RID, ORCID
Tichý, M. (CZ)
Jastrabík, Lubomír (FZU-D) RID, ORCIDSource Title Plasma 2007. - Melville, New York : American Instritute of Physics, 2008 / Hartfuss H.-J. ; Dudeck M. ; Muslelok J. ; Sadowski M.J. - ISBN 978-0-7354-0512-7 Pages s. 427-430 Number of pages 4 s. Action International Conference on Research and Applications of Plasmas, German-Polish Conference on Plasma Diagnostics for Fusion and Laboratory /4./ and French-Polish Seminar on Thermal Plasma in Space and Laboratory /6./ Event date 16.10.2007-19.10.2007 VEvent location Greifswald Country DE - Germany Event type WRD Language eng - English Country US - United States Keywords hollow cathode ; plasma jet ; ion flux ; deposition of thin films Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) KAN400720701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GA202/06/0776 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100522 - FZU-D (2005-2011) UT WOS 000254902600091 Annotation Measurements of positive ion flux to a negatively biased substrate for deposition of TiOx thin films by the hollow cathode plasma jet system are presented. Different methods of obtaining the bias of substrate and measuring the resulting ion flux were used for different bias frequencies. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2008
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