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Measuring the ion flux to the deposition substrate in the hollow Cathode plasma jet
- 1.VIROSTKO, P., HUBIČKA, Z., ČADA, M., ADÁMEK, P., KMENT, Š., TICHÝ, M., JASTRABÍK, L. Measuring the ion flux to the deposition substrate in the hollow Cathode plasma jet. In: HARTFUSS, H.-J., DUDECK, M., MUSLELOK, J., SADOWSKI, M.J., eds. Plasma 2007. Melville, New York: American Instritute of Physics, 2008, s. 427-430. AIP Conference Proceedings, 993. ISBN 978-0-7354-0512-7.
Number of the records: 1