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Measuring the ion flux to the deposition substrate in the hollow Cathode plasma jet

  1. 1.
    VIROSTKO, P., HUBIČKA, Z., ČADA, M., ADÁMEK, P., KMENT, Š., TICHÝ, M., JASTRABÍK, L. Measuring the ion flux to the deposition substrate in the hollow Cathode plasma jet. In: HARTFUSS, H.-J., DUDECK, M., MUSLELOK, J., SADOWSKI, M.J., eds. Plasma 2007. Melville, New York: American Instritute of Physics, 2008, s. 427-430. AIP Conference Proceedings, 993. ISBN 978-0-7354-0512-7.
Number of the records: 1  

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