Backscattered electron imaging using the improved YAG scintillation detector
1.
SYSNO ASEP
0205648
Document Type
C - Proceedings Paper (int. conf.)
R&D Document Type
Conference Paper
Title
Backscattered electron imaging using the improved YAG scintillation detector
Author(s)
Autrata, Rudolf (UPT-D) Matějková, Jiřina (UPT-D)
Source Title
Proceedings of the 6th Multinational Congress on Microscopy - European Extension / Milat O. ; Ježek D.. - Zagreb : Croatian Society for Electron Microscopy, 2003
Pages
s. 450 - 451
Number of pages
2 s.
Action
MCEM
Event date
01.06.2003-05.06.2003
VEvent location
Pula
Country
HR - Croatia
Event type
EUR
Language
eng - English
Country
HR - Croatia
Keywords
backscattered electron ; scintillator ; detector
Subject RIV
JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects
IBS2065107 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ
AV0Z2065902 - UPT-D
Annotation
It is known that the E-T scintillation PMT system [1] represents the most efficient detector of signal electrons in the SEM. Today, practically all types of SEMs are standardly equipped with this detector for the detection of secondary electrons (SEs). For backscattered electrons (BSEs) not only scintillation detector but also semiconductor and channel plate detectors are used. The highest detection quantum efficiency (DQE) is achieved with the scintillation detector on the basis of the yttrium aluminium garnet single crystal scintillator (YAG)[2].
Workplace
Institute of Scientific Instruments
Contact
Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing
2004
Number of the records: 1
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