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Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology
- 1.0205322 - UPT-D 20000101 RIV CZ eng J - Journal Article
Hutař, Otakar - Oral, Martin - Müllerová, Ilona - Romanovský, Vladimír
Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology.
Jemná mechanika a optika. Roč. 45, č. 10 (2000), s. 271-272. ISSN 0447-6441
R&D Projects: GA AV ČR IBS2065017
Institutional research plan: CEZ:AV0Z2065902
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
The low energy backscattered electron (BSE) detector, equipped with an electrostatic immersion lens for the retardation of the primary electron beam (PE) was elaborated and used for the imaging of surface semiconductor device specimens in a commercial SEM. Despite the signal of BSE is generally lower than that obtained using secondary electrons (SE), the achieved results predestine this BSE detection method as a suitable tool for the inspection of fine structures of semiconductor devices and linewidth measurements of critical dimensions (CD).
Permanent Link: http://hdl.handle.net/11104/0100937
Number of the records: 1