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Detection of angular distribution of the signal electrons in VLESEM
- 1.0205254 - UPT-D 20000030 RIV CZ eng C - Conference Paper (international conference)
Horáček, Miroslav
Detection of angular distribution of the signal electrons in VLESEM.
Proceedings of the 12th European Congress on Electron Microscopy. Brno: Czechoslovak Society for Electron Microscopy, 2000 - (Frank, L.; Čiampor, F.), s. I477-I478. ISBN 80-238-5503-4.
[EUREM /12./ - European Congress on Electron Microscopy. Brno (CZ), 09.07.2000-14.07.2000]
R&D Projects: GA ČR GA102/00/P001
Institutional research plan: CEZ:AV0Z2065902
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
The aim of this work is to design a detector for the angle and energy-selective detection of signal electrons in very low energy scanning electron microscopy (VLESEM), based on the directly electron-bombarded CCD sensor (EBCCD). The planar CCD sensor is very suitable for conversion of the area information carried by impinging electrons of the signal beam into the electrical signal that can be further processed.
Permanent Link: http://hdl.handle.net/11104/0100872
Number of the records: 1