IR laser induced decomposition of tetravinylsilane for deposition of SixC1-x coatings

Number of the records: 1

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SYSNO	0165528
Title	IR laser induced decomposition of tetravinylsilane for deposition of SixC1-x coatings
Author(s)	Dřínek, Vladislav (UCHP-M)_{RID, ORCID, SAI} Bastl, Zdeněk (UFCH-W)_{RID, ORCID} Šubrt, Jan (UACH-T)_{SAI, RID} Urbanová, Markéta (UCHP-M)_{RID, SAI} Pola, Josef (UCHP-M)_{RID, ORCID, SAI}
Source Title	4th Conference in Optics ROMOPTO'94. s. 163-165. - Bucharest : The International Society for Optical Engineering, 1994 / Vlad V.I.
Conference	Conference in Optics ROMOPTO'94 /4/, 05.09.1994-08.09.1994
Document Type	Abstrakt
Language	eng
Country	US
Permanent Link	http://hdl.handle.net/11104/0214940

Number of the records: 1