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Contrast at Very Low Energies of the Gold/Carbon Specimen for Resolution Testing
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SYSNO ASEP 0100008 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Contrast at Very Low Energies of the Gold/Carbon Specimen for Resolution Testing Title Kontrast při velmi nízkých energiích u vzorku zlato/uhlík pro testování rozlišení Author(s) Müllerová, Ilona (UPT-D) RID, SAI, ORCID
Frank, Luděk (UPT-D) RID, SAI, ORCIDSource Title Scanning - ISSN 0161-0457
Roč. 25, 18/24 (2004), s. 18-24Number of pages 7 s. Language eng - English Country US - United States Keywords scanning electron microscope ; very low energy ; cathode lens Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects IAA1065304 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) Annotation This paper concerns the problem of testing the image resolution in scanned electron micrographs, namely from the point of view of the image contrast for the standard gold/carbon test specimen within the full energy scale, down to eV units. Microscopes equipped with a cathode lens are considered and experimental results are presented for three devices differing in vacuum conditions and fields surrounding the specimen. At very low energies, the contrast is shown to either invert or disappear and this ambiguity is discussed and confronted with data simulated on the basis of measured electron yields from gold and carbon. It is concluded that the observations can be explained in terms of the surface cleanliness and strength of in the surrounding fields Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2005
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