Enhancement of SEM to scanning LEEM

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SYSNO ASEP	0088945
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Enhancement of SEM to scanning LEEM
Title	Rozšíření SEM na rastrovací LEEM
Author(s)	Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} Matsuda, K. (JP) Hrnčiřík, Petr (UPT-D) Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	Surface Science. - : Elsevier - ISSN 0039-6028 Roč. 601, č. 20 (2007), s. 4768-4773
Number of pages	6 s.
Language	eng - English
Country	NL - Netherlands
Keywords	SEM ; LEEM ; scanning LEEM
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	GA102/05/2327 GA ČR - Czech Science Foundation (CSF)
	GA202/04/0281 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
UT WOS	000250889500020
DOI	10.1016/j.susc.2007.05.042
Annotation	Paper summarizes ways to incorporating the scanning LEEM method into a conventional SEM via introduction of the cathode lens to below the objective lens. Basic properties of the scanning LEEM are provided.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2008

Number of the records: 1