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RBS-channeling, ERDA and XRD study of lithium tantalate modified by annealed proton exchange (APE)
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SYSNO ASEP 0040313 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title RBS-channeling, ERDA and XRD study of lithium tantalate modified by annealed proton exchange (APE) Title Studium tantaličnanu lithného modifikovaného protonovou výměnou metodami RBS-kanálování, ERDA a rentgenovské fluorescence Author(s) Macková, Anna (UJF-V) RID, ORCID, SAI
Salavcová, L. (CZ)
Špirková, J. (CZ)
Groetzschel, R. (DE)
Eichhorn, F. (DE)Source Title Nuclear Instruments & Methods in Physics Research Section B. - : Elsevier - ISSN 0168-583X
Roč. 249, 1-2 (2006), s. 339-342Number of pages 3 s. Language eng - English Country NL - Netherlands Keywords RBS-channeling ; ERDA ; LiTaO3 Subject RIV BG - Nuclear, Atomic and Molecular Physics, Colliders R&D Projects KJB100480601 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z10480505 - UJF-V (2005-2011) Annotation Lithium tantalate (LT) single crystals are very promising substrates for constructing highly sophisticated photonics devices. The used procedure for fabricating optical waveguides in them was annealed proton exchange (APE). Here we have used Rutherford backscattering spectrometry (RBS) – channeling analysis, X-ray diffraction (XRD) and elastic recoil detection analysis (ERDA) to study changes in the surface of the LT wafers caused by the APE treatment and to determine the concentration depth profiles of hydrogen atoms. The measurements were taken for both virgin (untreated) and APE:LT samples fabricated using various experimental conditions. We have found that the incorporation of hydrogen during the first step, i.e. the PE procedure (proton exchange), leads to modifications of the structure of the LT single crystal, which gradually relaxed towards the structure of the original LT during the post-proton-exchange annealing (A). Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2007
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