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Compensated telecentric F-Theta projection objective for micromachining applications at 257 nm
- 1.Mrňa, L., Kolařík, V., Hopp, J., Horák, S., Stoklasa, B., Úlehla, L. Compensated telecentric F-Theta projection objective for micromachining applications at 257 nm. Ústav přístrojové techniky AV ČR, v. v. i., Meopta - optika, s.r.o., 2022. Functional Specimen APL-2022-38.
Number of the records: 1