Number of the records: 1
Effects of metal layers on chemical vapor deposition of diamond films
- 1.
SYSNO ASEP 0570909 Document Type A - Abstract R&D Document Type O - Ostatní Title Effects of metal layers on chemical vapor deposition of diamond films Author(s) Izsák, Tibor (FZU-D) ORCID
Vanko, G. (SK)
Babčenko, Oleg (FZU-D) ORCID
Zaťko, B. (SK)
Kromka, Alexander (FZU-D) RID, ORCID, SAINumber of authors 5 Source Title NANOCON 2022 - Book of Abstracts. - Ostrava : Tanger Ltd, 2022 / Zbořil R. ; Váňová J. - ISBN 978-80-88365-07-5
S. 68-68Number of pages 1 s. Publication form Online - E Action International Conference on Nanomaterials - Research & Application /14./ NANOCON Event date 19.10.2022 - 21.10.2022 VEvent location Brno Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords diamond ; CVD ; metallization ; iridium ; Raman ; SEM Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Materials engineering R&D Projects LM2018110 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LUASK22147 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 Annotation Here, we present the influence of thin metal (Ni, Ir, Au) layers on diamond growth by MWCVD employing two different concepts. In the first concept, a flat substrate (GaN) was initially coated with a thin metal layer, then exposed to the diamond MWCVD process. In the second concept, the thin diamond film was firstly formed, then it was overcoated with the metal layer and finally, once again exposed to the diamond MWCVD. It was confirmed that the Ni films hinder the formation of diamond crystals resulting in the formation of an amorphous carbon layer. Contrary to this finding, the Ir layer resulted in a successful overgrowth by the fully closed diamond film. However, by employing concept 2, the thin Ir layer was found to be unstable and transferred into the isolated clusters, which were overgrown by the diamond film. Using the Au/Ir (30/15 nm) bilayer system stabilized the metallization and no diamond growth was observed on the metal layer. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2024
Number of the records: 1