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Ni-Au layers on sapphire prepared by direct current magnetron sputtering
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SYSNO ASEP 0563460 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Ni-Au layers on sapphire prepared by direct current magnetron sputtering Author(s) Mikšová, Romana (UJF-V) RID, ORCID, SAI
Jagerová, Adéla (UJF-V) ORCID, SAI
Poustka, D. (CZ)
Macková, Anna (UJF-V) RID, ORCID, SAINumber of authors 4 Source Title Radiation Effects and Defects in Solids. - : Taylor & Francis - ISSN 1042-0150
Roč. 177, 11-12 (2022), s. 1288-1299Number of pages 12 s. Publication form Print - P Language eng - English Country GB - United Kingdom Keywords Bimetallic layer ; SEM ; magnetron sputtering ; RBS OECD category Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect) R&D Projects EF16_013/0001812 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Research Infrastructure CANAM II - 90056 - Ústav jaderné fyziky AV ČR, v. v. i. Method of publishing Limited access Institutional support UJF-V - RVO:61389005 UT WOS 000870601000001 EID SCOPUS 85140344693 DOI 10.1080/10420150.2022.2136091 Annotation Thin bimetallic Ni-Au layers (similar to 100 nm) with three different Au content were prepared by direct current magnetron sputtering onto sapphire substrates. The elemental composition and the layer thickness of bimetallic layers were controlled during the sputtering process. The prepared Ni-Au layers were annealed at temperatures of 400 degrees C and 900 degrees C in the air to determine the behavior of Au and Ni in the layers after heating. The elemental composition and depth profiling was provided by Rutherford backscattering spectrometry (RBS). The surface morphology was examined via Scanning electron microscopy (SEM). RBS measurement revealed inter-diffusion Au into sapphire substrate after thermal annealing and the formation of grains and voids. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2023 Electronic address https://doi.org/10.1080/10420150.2022.2136091
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