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Development and measurement of gas sensors based on diamond and transition metal dichalcogenide materials
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SYSNO ASEP 0546604 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Development and measurement of gas sensors based on diamond and transition metal dichalcogenide materials Author(s) Kočí, Michal (FZU-D) ORCID
Izsák, T. (SK)
Vanko, M. (SK)
Sojková, M. (SK)
Husák, M. (CZ)
Kromka, Alexander (FZU-D) RID, ORCID, SAINumber of authors 6 Source Title Proceedings of ADEPT - ADEPT 2021. - Žilina : University of Žilina, 2021 / Jandura D. ; Maniaková P. ; Lettrichová I. ; Kováč, jr. J. - ISBN 978-80-554-1806-3 Pages s. 115-118 Number of pages 4 s. Publication form Online - E Action 9th International Conference on Advances in Electronic and Photonic Technologies - ADEPT 2021 Event date 20.09.2021 - 23.09.2021 VEvent location Podbanské Country SK - Slovakia Event type EUR Language eng - English Country SK - Slovakia Keywords nanocrystalline diamond (NCD) ; transition metal dichalcogenide (TMD) ; gas detectors Subject RIV JB - Sensors, Measurment, Regulation OECD category Materials engineering R&D Projects EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LM2018110 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 Annotation Gas sensing properties of a nanocrystalline diamond with hydrogen-terminated surface (H-NCD) and a transition metal dichalcogenide (TMD) are investigated as conductivity sensors employing device design with built-in interdigital metal electrode structures. The TMDs were prepared by a carbide-free one-zone sulfurization method directly on the SiO2/Si or NCD/Si substrates. On the individual level, the sensors showed a notable electrical response to the examined gas types, i.e., oxidizing (NO2) and reducing (NH3) gases. For reference, commercially available sensor was used (conductive SnO2 or infra-red type). Advantageously, it was found that the NCD/TMD heterostructure results in enhanced signal stability and gas sensing response at room temperature compared to both bare TMD and H-NCD layers. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2022
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