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Ion beam figuring with using Einzel lens
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SYSNO ASEP 0536126 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Ion beam figuring with using Einzel lens Author(s) Karabyn, Vasyl (UFP-V) ORCID
Polák, Jaroslav (UFP-V) RID
Procháska, František (UFP-V) RID
Melich, Radek (UFP-V) RIDNumber of authors 4 Article number 1138508 Source Title SPIE: Optics and Measurement 2019 International Conference. - Bellingham : SPIE, 2019 - ISBN 978-1-5106-3548-7 Pages roč. 11385 (2019) Number of pages 7 s. Publication form Online - E Action Optics and Measurement International Conference Event date 08.10.2019 - 10.10.2019 VEvent location Liberec Country CZ - Czech Republic Event type EUR Language eng - English Country US - United States Keywords Dwell-time correction ; Einzel lens ; focused ion beam ; ion beam figuring Subject RIV BL - Plasma and Gas Discharge Physics OECD category Fluids and plasma physics (including surface physics) Institutional support UFP-V - RVO:61389021 EID SCOPUS 85079063043 DOI 10.1117/12.2542822 Annotation Ion Beam Figuring (IBF) has been used for nearly 20 years by several laboratories and companies as a highly deterministic method of final processing of ultra-precision optical elements. Nowadays, requirements for high precision optics demand to have full control over the ion beam, which includes both the ion beam profile and intensity. Electrostatic focusing using an Einzel lens setup provides a simple option to control the ion beam shape by changing voltage. This experimental study investigates the early stage development of an Einzel lens used to control an RF40 ion source. First results demonstrate the possibility to use an Einzel lens to control the ion beam profile and indicate possible future challenges this technology has to overcome when used in IBF machines. Workplace Institute of Plasma Physics Contact Vladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975 Year of Publishing 2021 Electronic address https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11385/2542822/Ion-beam-figuring-with-using-Einzel-lens/10.1117/12.2542822.short
Number of the records: 1