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Functional nano-structuring of thin silicon nitride membranes
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SYSNO 0525191 Title Functional nano-structuring of thin silicon nitride membranes Author(s) Matějka, Milan (UPT-D) RID, ORCID, SAI
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Řiháček, Tomáš (UPT-D) RID, ORCID
Knápek, Alexandr (UPT-D) RID, ORCID, SAI
Kolařík, Vladimír (UPT-D) RID, ORCID, SAICorespondence/senior Matějka, Milan - Korespondující autor Source Title Journal of Electrical Engineering - Elektrotechnický časopis. Roč. 71, č. 2 (2020), s. 127-130. - : Slovenská technická univerzita v Bratislave Document Type Článek v odborném periodiku Grant TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 Language eng Country SK Keywords membrane * nano optical device * electron optics * electron beam lithography * silicon nitride * reactive ion etching * silicon etching * microfabrication URL https://content.sciendo.com/view/journals/jee/71/2/article-p127.xml Permanent Link http://hdl.handle.net/11104/0309382
Number of the records: 1