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Comparison of three focus sensors for optical topography measurement of rough surfaces
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SYSNO ASEP 0511898 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Comparison of three focus sensors for optical topography measurement of rough surfaces Author(s) Šarbort, Martin (UPT-D) RID, ORCID, SAI
Holá, Miroslava (UPT-D) RID, ORCID, SAI
Pavelka, Jan (UPT-D) RID, SAI
Schovánek, P. (CZ)
Řeřucha, Šimon (UPT-D) RID, ORCID, SAI
Oulehla, Jindřich (UPT-D) RID, ORCID, SAI
Fořt, Tomáš (UPT-D) RID, ORCID, SAI
Lazar, Josef (UPT-D) RID, ORCID, SAINumber of authors 8 Source Title Optics Express. - : Optical Society of America - ISSN 1094-4087
Roč. 27, č. 23 (2019), s. 33459-33473Number of pages 15 s. Publication form Print - P Language eng - English Country US - United States Keywords profilometry ; stylus ; beam Subject RIV BH - Optics, Masers, Lasers OECD category Optics (including laser optics and quantum optics) R&D Projects EF16_026/0008460 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Open access Institutional support UPT-D - RVO:68081731 UT WOS 000495871300053 EID SCOPUS 85075269050 DOI 10.1364/OE.27.033459 Annotation The study compares three variants of focus sensors designed for the optical topography measurement of rough surface specimens with submicron accuracy. We present a theoretical analysis of the focus sensor principles and the experimental measurements with a single point laser probe. A low coherent illumination beam was provided by a monochromatic laser source and a rotating diffuser, which reduced the speckles generated by the rough surface. The reflected beam was modulated by three specific optical elements (axicon, double wedge prism, four spherical lenses) realized by a spatial light modulator. A digital camera detected the output intensity patterns that were evaluated by the intensity centroid method. The results showed a good coincidence of the surface profiles obtained by the three sensor variants with the root-mean-square deviations below one micron. We discuss the results obtained for several specimens with various surface roughness and compare the differences between the three focus sensor variants. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2020 Electronic address https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-27-23-33459&id=422804
Number of the records: 1