Number of the records: 1
Design of magnetic field configuration for controlled discharge properties in highly ionized plasma
- 1.0510804 - FZÚ 2020 RIV GB eng J - Journal Article
Alami, J. - Straňák, V. - Herrendorf, A.-P. - Hubička, Zdeněk - Hippler, R.
Design of magnetic field configuration for controlled discharge properties in highly ionized plasma.
Plasma Sources Science & Technology. Roč. 24, č. 4 (2015), s. 1-10, č. článku 045016. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA ČR GAP108/12/2104
Institutional support: RVO:68378271
Keywords : HiPIMS * magnetic field design * balanced versus unbalanced magnetron * Langmuir probe * ion distribution function
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 2.808, year: 2015
Method of publishing: Limited access
https://doi.org/10.1088/0963-0252/24/4/045016
In the present article, the effect of magnetic field design on electron and ion properties in both a metallic Ti/Ar and a reactive Ti/Ar + O2 high power impulse magnetron sputtering (HiPIMS) discharges is investigated.
Permanent Link: http://hdl.handle.net/11104/0301185
Number of the records: 1