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Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

  1. 1.
    SYSNO0441167
    TitleEvolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source
    Author(s) Roy, Amitava (FZU-D)
    Arai, G. (JP)
    Hara, H. (JP)
    Higashiguchi, T. (JP)
    Ohashi, H. (JP)
    Sunahara, A. (JP)
    Li, B. (CN)
    Dunne, P. (IE)
    O´Sullivan, G. (IE)
    Miura, Taisuke (FZU-D) RID
    Mocek, Tomáš (FZU-D) RID, ORCID, SAI
    Endo, Akira (FZU-D) RID
    Source Title Applied Physics Letters. Roč. 105, č. 7 (2014), "074103-1"-"074103-4". - : AIP Publishing
    Document TypeČlánek v odborném periodiku
    Grant CZ.1.05/2.1.00/01.0027, XE - EU countries
    ED2.1.00/01.0027 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    CZ.1.07/2.3.00/20.0143, XE - EU countries
    EE2.3.20.0143 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    CZ.1.07/2.3.00/30.0057, XE - EU countries
    EE2.3.30.0057 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    Institutional supportFZU-D - RVO:68378271
    Languageeng
    CountryUS
    Keywords laser-produced plasma * dynamics * EUV source * ultraviolet source * targets
    Permanent Linkhttp://hdl.handle.net/11104/0244201
     
Number of the records: 1  

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