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Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source
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SYSNO ASEP 0441167 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source Author(s) Roy, Amitava (FZU-D)
Arai, G. (JP)
Hara, H. (JP)
Higashiguchi, T. (JP)
Ohashi, H. (JP)
Sunahara, A. (JP)
Li, B. (CN)
Dunne, P. (IE)
O´Sullivan, G. (IE)
Miura, Taisuke (FZU-D) RID
Mocek, Tomáš (FZU-D) RID, ORCID, SAI
Endo, Akira (FZU-D) RIDSource Title Applied Physics Letters. - : AIP Publishing - ISSN 0003-6951
Roč. 105, č. 7 (2014), "074103-1"-"074103-4"Number of pages 4 s. Language eng - English Country US - United States Keywords laser-produced plasma ; dynamics ; EUV source ; ultraviolet source ; targets Subject RIV BH - Optics, Masers, Lasers R&D Projects ED2.1.00/01.0027 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) EE2.3.20.0143 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) EE2.3.30.0057 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 UT WOS 000341189800113 DOI 10.1063/1.4893611 Annotation We have investigated the effect of irradiation of solid Sn targets with laser pulses of sub-ns duration and sub-mJ energy on the diameter of the extreme ultraviolet (EUV) emitting region and source conversion efficiency. It was found that an in-band EUV source diameter as low as 18 lm was produced due to the short scale length of a plasma produced by a sub-ns laser. Most of the EUV emission occurs in a narrow region with a plasma density close to the critical density value. Such EUV sources are suitable for high brightness and high repetition rate metrology applications. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2015
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