Multi-SWD plasma jet system for PECVD deposition of thin films

Number of the records: 1

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SYSNO	0438735
Title	Multi-SWD plasma jet system for PECVD deposition of thin films
Author(s)	Olejníček, Jiří (FZU-D)_{RID, ORCID} Čada, Martin (FZU-D)_{RID, ORCID, SAI} Šmíd, Jiří (FZU-D) Kment, Štěpán (FZU-D)_{RID, ORCID} Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI}
Source Title	IEEE Transactions on Plasma Science. Roč. 42, č. 10 (2014), s. 2502-2503. - : Institute of Electrical and Electronics Engineers
Document Type	Článek v odborném periodiku
Grant	TA01011740 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	LH12045 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	M100101215, CZ - Czech Republic
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	US
Keywords	nuclear and plasma sciences * plasma applications * plasma devices * plasmas
Permanent Link	http://hdl.handle.net/11104/0242111

Number of the records: 1