Number of the records: 1
Multi-SWD plasma jet system for PECVD deposition of thin films
- 1.Olejníček, Jiří - Čada, Martin - Šmíd, Jiří - Kment, Štěpán - Hubička, Zdeněk
Multi-SWD plasma jet system for PECVD deposition of thin films.
IEEE Transactions on Plasma Science. Roč. 42, č. 10 (2014), s. 2502-2503. ISSN 0093-3813. E-ISSN 1939-9375
Impact factor: 1.101, year: 2014
http://hdl.handle.net/11104/0242111
Number of the records: 1