Number of the records: 1
Multi-SWD plasma jet system for PECVD deposition of thin films
- 1.0438735 - FZÚ 2015 RIV US eng J - Journal Article
Olejníček, Jiří - Čada, Martin - Šmíd, Jiří - Kment, Štěpán - Hubička, Zdeněk
Multi-SWD plasma jet system for PECVD deposition of thin films.
IEEE Transactions on Plasma Science. Roč. 42, č. 10 (2014), s. 2502-2503. ISSN 0093-3813. E-ISSN 1939-9375
R&D Projects: GA TA ČR TA01011740; GA MŠMT LH12045
Grant - others:AVČR(CZ) M100101215
Institutional support: RVO:68378271
Keywords : nuclear and plasma sciences * plasma applications * plasma devices * plasmas
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 1.101, year: 2014
Permanent Link: http://hdl.handle.net/11104/0242111
Number of the records: 1