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Multi-SWD plasma jet system for PECVD deposition of thin films
- 1.Olejníček, J., Čada, M., Šmíd, J., Kment, Š., Hubička, Z. Multi-SWD plasma jet system for PECVD deposition of thin films. IEEE Transactions on Plasma Science. 2014, 42(10), 2502-2503. ISSN 0093-3813. E-ISSN 1939-9375. Available: doi: 10.1109/TPS.2014.2314214
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