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Ultra-fast three dimensional microanalysis using the scanning electron microscope equipped with xenon plasma focused ion beam
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SYSNO ASEP 0432741 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title Ultra-fast three dimensional microanalysis using the scanning electron microscope equipped with xenon plasma focused ion beam Author(s) Dluhoš, J. (CZ)
Petrenec, M. (CZ)
Peřina, P. (CZ)
Reinauer, F. (DE)
Kopeček, Jaromír (FZU-D) RID, ORCID
Hrnčíř, T. (CZ)
Jiruše, J. (CZ)Source Title Proceedings of 18th International Microscopy Congress. - Prague : Czechoslovak Microscopy Society, 2014 / Hozák P. - ISBN 978-80-260-6721-4 Number of pages 1 s. Publication form Online - E Action International Microscopy Congress /18./ Event date 07.09.2014-12.09.2014 VEvent location Prague Country CZ - Czech Republic Event type WRD Language eng - English Keywords SEM ; FIB ; xenon Subject RIV BM - Solid Matter Physics ; Magnetism Institutional support FZU-D - RVO:68378271 Annotation The three dimensional microanalysis became a widely accepted analytical method during the past few years, gaining from the ability to describe the materials structure and composition as it exists in real components. A high resolution scanning electron microscope (SEM) combined with a focused ion beam (FIB) is used for a high precision tomographical method based on FIB slicing and SEM observation of the slice. The FIB-SEM can be further equipped by analytical methods like energy-dispersive X-ray spectrometer (EDS) for elemental composition or electron backscattered diffraction analyzer (EBSD) for crystal orientation mapping, resulting in 3D microanalysis, i.e. 3D EDS and 3D EBSD. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2015
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