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Nanodiamond
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SYSNO ASEP 0432021 Document Type M - Monograph Chapter R&D Document Type Monograph Chapter Title Low temperature diamond growth Author(s) Ižák, Tibor (FZU-D) RID
Babchenko, Oleg (FZU-D) RID, ORCID
Potocký, Štěpán (FZU-D) RID, ORCID
Remeš, Zdeněk (FZU-D) RID, ORCID
Kozak, Halyna (FZU-D) RID, ORCID
Verveniotis, Elisseos (FZU-D) RID
Rezek, Bohuslav (FZU-D) RID, ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAISource Title Nanodiamond. - Cambridge : The Royal Society of Chemistry, 2014 / Williams O.A. - ISBN 978-1-84973-639-8 Pages s. 290-342 Number of pages 53 s. Number of pages 530 Publication form Print - P Language eng - English Country GB - United Kingdom Keywords diamond film ; pulsed linear antenna MWCVD ; low temperature deposition ; temperature sensitive substrates Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects GBP108/12/G108 GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 DOI 10.1039/9781849737616-00290 Annotation The present chapter focuses on the low temperature diamond growth from technological and practical point of view. The LTDG process is divided in two strategies based i) on the modification of the deposition systems and ii) on the change of gas chemistry. State of the art of each strategy and involved fundamental growth processes are reviewed. Among the discussed diamond growth processes, microwave surface wave plasma in linear antenna configuration with oxygen containing gas mixture is shown as the most promising process for the LTDG over large areas with high optical and electronic grade material. The growth phenomena observed in the linear antenna microwave plasma provide a simple way to control nano- and poly-crystalline diamond character. A practical comparison between focused and linear antenna microwave plasma is presented on several key studies which utilize the LTDG on amorphous silicon, glass, germanium and optical elements used for IR spectroscopy. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2015
Number of the records: 1